Hauzer Techno Coating (member of the IHI Group, division Industrial Machinery) offers a solution for coating large substrates in a cost-effective way. The patented Antenna ARRAY Technology, developed by IHI, uses Very High Frequency (VHF 30~300 MHz).

Advantages VHF:

• High deposition rate, due to high plasma density
• High quality film formation, due to low electron temperature

VHF  +  Antenna ARRAY Technology  =
UNIFORM DEPOSITION ON LARGE SUBSTRATES

Advantages VHF Antenna ARRAY Technology:

• Uniform deposition on large substrates
• Cost-efficient process: two substrates per plasma zone;
  more plasma zones in one chamber
• Many coatings possible: oxide coatings, nitride coatings, DLC coatings, etc.
• Many substrates possible: glass, plastics, foils, etc.

Hauzer offers the patented VHF Antenna ARRAY Technology to any industry that needs coating of large substrates. Specific application know-how can be combined with Hauzer's decennia-long experience in plasma coating technology to obtain an excellent market position for our customer. The professional team of IHI and Hauzer experts offers worldwide customer support.

Please download the brochure about Antenna ARRAY Technology here.

Please contact us for more information concerning your specific market.

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